The formation of the films which made the conflicting property compatible. (hardness and low refractive index and stability) The films were prepared using the fluorinated silicate derivatives loading the low environment.
Background and targets
Concept
■To inhibit lowering strength of a porous film, introduction of the obtuse-angled pores with less than 150 nm in a diameter should be investigated. Fractural strength (σA) of a porous film is described by the following equation.
■To prepare a porous film with the obtuse-angled pores, the silicate precursor with fluorine-contained alkyl groups is investigated.
Characteristic of the present technology
- ■The porous films with the obtuse-angled pores with less than 150nm in a diameter are formed using the silicate precursor with fluorine-contained alkyl groups.
- ■The resultant films have the properties such as followings; (1) Low refractive index (1.38) and 3H hardness, (2) Homogeneous introduction of the fluorine elements, (3) Water and oil repellency and very small slip angle (e.g. 7deg. to oil).
- ■It is revealed incorporation of the obtuse-angled pores are attractive for increasing porous film strength.
Proposal by KRI
KRI will propose the following application using the present special technique.
- ■Development of the hard and low refractive index films for the AR film
- ■Development of surface treatment agents and of films with water and oil repellency
- ■Development of the surface treatment films superior in low friction and wear resistance